JPH01119061U - - Google Patents
Info
- Publication number
- JPH01119061U JPH01119061U JP1414988U JP1414988U JPH01119061U JP H01119061 U JPH01119061 U JP H01119061U JP 1414988 U JP1414988 U JP 1414988U JP 1414988 U JP1414988 U JP 1414988U JP H01119061 U JPH01119061 U JP H01119061U
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- boat
- compound semiconductor
- semiconductor single
- crystal manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 9
- 150000001875 compounds Chemical class 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000003708 ampul Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1414988U JPH01119061U (en]) | 1988-02-04 | 1988-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1414988U JPH01119061U (en]) | 1988-02-04 | 1988-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01119061U true JPH01119061U (en]) | 1989-08-11 |
Family
ID=31225090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1414988U Pending JPH01119061U (en]) | 1988-02-04 | 1988-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01119061U (en]) |
-
1988
- 1988-02-04 JP JP1414988U patent/JPH01119061U/ja active Pending
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